From barlian at snf.stanford.edu Sun May 2 15:42:21 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 2 May 2004 15:42:21 -0700 Subject: Problem matrix 2004-05-02 15:42:20: pumpdown failure Message-ID: From sumita at snf.stanford.edu Tue May 4 01:40:11 2004 From: sumita at snf.stanford.edu (sumita at snf.stanford.edu) Date: Tue, 4 May 2004 01:40:11 -0700 Subject: Problem matrix 2004-05-04 01:40:10: Pumpdown failure Message-ID: matrix program terminates due to pumpdown failure From sumita at snf.stanford.edu Tue May 4 01:40:42 2004 From: sumita at snf.stanford.edu (sumita at snf.stanford.edu) Date: Tue, 4 May 2004 01:40:42 -0700 Subject: Comment matrix 2004-05-04 01:40:42: pumpdown failure Message-ID: matrix program terminates due to pumpdown failure From latta at snf.stanford.edu Wed May 5 14:40:15 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 May 2004 14:40:15 -0700 Subject: Shutdown matrix 2004-05-05 14:40:14: pumpdown failure Message-ID: Putting on shutdown from problem status- don't want to get any hopes up.... From cbaxter at snf.stanford.edu Wed May 5 19:03:42 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 May 2004 19:03:42 -0700 Subject: Shutdown matrix 2004-05-05 14:40:14: pumpdown failure Message-ID: changed new bad pump From cbaxter at snf.stanford.edu Wed May 5 19:03:47 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 May 2004 19:03:47 -0700 Subject: Comment matrix 2004-05-04 01:40:42: pumpdown failure Message-ID: From cbaxter at snf.stanford.edu Wed May 5 19:03:54 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 May 2004 19:03:54 -0700 Subject: Problem matrix 2004-05-04 01:40:10: Pumpdown failure Message-ID: From cbaxter at snf.stanford.edu Wed May 5 19:03:59 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 May 2004 19:03:59 -0700 Subject: Problem matrix 2004-05-02 15:42:20: pumpdown failure Message-ID: From davehong at snf.stanford.edu Wed May 12 17:27:11 2004 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Wed, 12 May 2004 17:27:11 -0700 Subject: Problem matrix 2004-05-12 17:27:11: pumpdown failure Message-ID: Ran the standard recipe but keeps on getting "pumpdown failure" message. Process then was aborted. From daesung at snf.stanford.edu Wed May 12 22:48:50 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 12 May 2004 22:48:50 -0700 Subject: Shutdown matrix 2004-05-12 22:48:50: Pumpdown failure Message-ID: From eenriquez at snf.stanford.edu Thu May 13 13:52:13 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 May 2004 13:52:13 -0700 Subject: Shutdown matrix 2004-05-12 22:48:50: Pumpdown failure Message-ID: Found a bad door o-ring. Replaced o-ring, cleaned the chamber also replaced a gas feedthrough fitting. From eenriquez at snf.stanford.edu Thu May 13 13:52:26 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 May 2004 13:52:26 -0700 Subject: Problem matrix 2004-05-12 17:27:11: pumpdown failure Message-ID: Found a bad door o-ring. Replaced o-ring, cleaned the chamber also replaced a gas feedthrough fitting. From daesung at snf.stanford.edu Fri May 14 17:15:46 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 14 May 2004 17:15:46 -0700 Subject: Problem matrix 2004-05-14 17:15:46: Wafer transport problem Message-ID: From eenriquez at snf.stanford.edu Mon May 17 07:42:46 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 May 2004 07:42:46 -0700 Subject: Problem matrix 2004-05-14 17:15:46: Wafer transport problem Message-ID: Ran several times with no problems. From hanjun at snf.stanford.edu Wed May 19 01:27:13 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Wed, 19 May 2004 01:27:13 -0700 Subject: Shutdown matrix 2004-05-19 01:27:12: transport error Message-ID: transport failed while receiving the wafer, which is currently inside the machine. please retrieve the wafer. thank you! From eenriquez at snf.stanford.edu Wed May 19 09:02:32 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 May 2004 09:02:32 -0700 Subject: Shutdown matrix 2004-05-19 01:27:12: transport error Message-ID: Reset the system. Ran 10 wafers with no problems. From rfasch at snf.stanford.edu Wed May 19 15:10:58 2004 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Wed, 19 May 2004 15:10:58 -0700 Subject: Shutdown matrix 2004-05-19 15:10:57: wafer in chamber Message-ID: display turned off, after reset looks OK, one wfer in chamber From eenriquez at snf.stanford.edu Wed May 19 15:27:46 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 May 2004 15:27:46 -0700 Subject: Shutdown matrix 2004-05-19 15:10:57: wafer in chamber Message-ID: The system powered down by itself. Recovered wafer and checked operation. From mislam at snf.stanford.edu Fri May 21 08:05:39 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 21 May 2004 08:05:39 -0700 Subject: Problem matrix 2004-05-21 08:05:38: Pump down failure Message-ID: Won't pump down, rejecting wafers. From eenriquez at snf.stanford.edu Fri May 21 09:59:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 May 2004 09:59:40 -0700 Subject: Problem matrix 2004-05-21 08:05:38: Pump down failure Message-ID: Replaced the door o-ring (viton) with a silicone o-ring. Also added oil to the pump. From mislam at snf.stanford.edu Mon May 24 10:09:20 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 24 May 2004 10:09:20 -0700 Subject: Problem matrix 2004-05-24 10:09:20: Screen frozen, won't response Message-ID: From cbaxter at snf.stanford.edu Mon May 24 16:34:03 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 May 2004 16:34:03 -0700 Subject: Problem matrix 2004-05-24 10:09:20: Screen frozen, won't response Message-ID: reset system From pethe at snf.stanford.edu Mon May 24 19:35:23 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 24 May 2004 19:35:23 -0700 Subject: Shutdown matrix 2004-05-24 19:35:23: vacuum pump dead Message-ID: The chambe could not pump down. From cbaxter at snf.stanford.edu Mon May 24 22:00:05 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 May 2004 22:00:05 -0700 Subject: Comment matrix 2004-05-24 22:00:04: vacuum pump is bad(seize) Message-ID: From rcrane at snf.stanford.edu Fri May 28 13:54:11 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 28 May 2004 13:54:11 -0700 Subject: Shutdown matrix 2004-05-24 19:35:23: vacuum pump dead Message-ID: Replaced vac pump, testing system From rcrane at snf.stanford.edu Fri May 28 13:54:38 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 28 May 2004 13:54:38 -0700 Subject: Comment matrix 2004-05-24 22:00:04: vacuum pump is bad(seize) Message-ID: Replaced vac pump, testing system. From jqguo at snf.stanford.edu Sat May 29 15:11:48 2004 From: jqguo at snf.stanford.edu (jqguo at snf.stanford.edu) Date: Sat, 29 May 2004 15:11:48 -0700 Subject: Problem matrix 2004-05-29 15:11:47: pumpdown failure Message-ID: cannot pumpdown when process. Seems some valve is not working. Wafer come ut of the chamber is very hot. From jqguo at snf.stanford.edu Sat May 29 15:11:59 2004 From: jqguo at snf.stanford.edu (jqguo at snf.stanford.edu) Date: Sat, 29 May 2004 15:11:59 -0700 Subject: Shutdown matrix 2004-05-29 15:11:54: Message-ID: