Shutdown matrix 2004-05-12 22:48:50: Pumpdown failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu May 13 13:52:13 PDT 2004

Previous message: Shutdown matrix 2004-05-12 22:48:50: Pumpdown failure
Next message: Problem matrix 2004-05-14 17:15:46: Wafer transport problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Found a bad door o-ring.  Replaced o-ring, cleaned the chamber also replaced a gas feedthrough fitting.

Previous message: Shutdown matrix 2004-05-12 22:48:50: Pumpdown failure
Next message: Problem matrix 2004-05-14 17:15:46: Wafer transport problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the matrix-pcs mailing list