Shutdown matrix 2004-05-19 01:27:12: transport error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed May 19 09:02:32 PDT 2004
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Shutdown matrix 2004-05-19 01:27:12: transport error
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Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
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Reset the system. Ran 10 wafers with no problems.
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Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
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