Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
rfasch at snf.stanford.edu
rfasch at snf.stanford.edu
Wed May 19 15:10:58 PDT 2004
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Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
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display turned off, after reset looks OK, one wfer in chamber
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