Problem matrix 2004-05-21 08:05:38: Pump down failure
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Fri May 21 08:05:39 PDT 2004
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Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
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Problem matrix 2004-05-21 08:05:38: Pump down failure
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Won't pump down, rejecting wafers.
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Shutdown matrix 2004-05-19 15:10:57: wafer in chamber
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Problem matrix 2004-05-21 08:05:38: Pump down failure
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