From eenriquez at snf.stanford.edu Thu Sep 2 14:35:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Sep 2004 14:35:58 -0700 Subject: Problem matrix SNF 2004-08-29 11:51:10: software crash Message-ID: Pump was not turning on. I/O chip output that turns on the pump was stuck in the intermidiate state 4 volts (should be 0 or 5). Temporarily grounded the output and everything worked. Cycled about 20 wafers with no problems. From okilic at snf.stanford.edu Wed Sep 8 22:42:27 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Wed, 8 Sep 2004 22:42:27 -0700 Subject: Problem matrix SNF 2004-09-08 22:42:26: won't exit standby Message-ID: Venting problem??? From eenriquez at snf.stanford.edu Thu Sep 9 09:40:51 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2004 09:40:51 -0700 Subject: Problem matrix SNF 2004-09-08 22:42:26: won't exit standby Message-ID: The door was stuck closed. Cleaned door and oring with IPA. Cycled door many times; no problems. From okilic at snf.stanford.edu Sat Sep 11 16:09:47 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sat, 11 Sep 2004 16:09:47 -0700 Subject: Problem matrix SNF 2004-09-11 16:09:46: won't exit standby Message-ID: Cannot pressurize chamber. From jackson at snf.stanford.edu Sun Sep 26 08:46:00 2004 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 26 Sep 2004 08:46:00 -0700 Subject: Problem matrix SNF 2004-09-26 08:45:59: matrix not in standby condition Message-ID: matrix left with "chamber door not open" flashing no problem had been reported From eenriquez at snf.stanford.edu Mon Sep 27 07:58:17 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Sep 2004 07:58:17 -0700 Subject: Problem matrix SNF 2004-09-26 08:45:59: matrix not in standby condition Message-ID: The chamber door was stuck. Lubricated the door hinges.