Problem matrix SNF 2004-08-29 11:51:10: software crash

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 2 14:35:58 PDT 2004


Pump was not turning on. I/O chip output that turns on the pump was stuck in the intermidiate state 4 volts (should be 0 or 5).  Temporarily grounded the output and everything worked.  Cycled about 20 wafers with no problems.




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