From ratiug at snf.stanford.edu  Wed Apr 13 17:13:55 2005
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Wed, 13 Apr 2005 17:13:55 -0700
Subject: Problem matrix SNF 2005-04-13 17:13:55: fail in step1
Message-ID: <mailman.509.1357938498.25810.matrix-pcs@snf.stanford.edu>

I run several time but continue failing in Step1.
It looks reflected power is too high (10) as forward power is ok (40)



From cbaxter at snf.stanford.edu  Wed Apr 13 17:37:53 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 13 Apr 2005 17:37:53 -0700
Subject: Problem matrix SNF 2005-04-13 17:13:55: fail in step1
Message-ID: <mailman.510.1357938498.25810.matrix-pcs@snf.stanford.edu>

found generator off. turn on generator and run 3 dummy wafer
without a problem rf is stable @450watts with reflective.



From pnataraj at snf.stanford.edu  Mon Apr 25 16:22:02 2005
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Mon, 25 Apr 2005 16:22:02 -0700
Subject: Problem matrix SNF 2005-04-25 16:21:56: Dont pupm; says Matching error
Message-ID: <mailman.511.1357938498.25810.matrix-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Apr 25 17:47:47 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 25 Apr 2005 17:47:47 -0700
Subject: Problem matrix SNF 2005-04-25 16:21:56: Dont pupm; says Matching error
Message-ID: <mailman.512.1357938498.25810.matrix-pcs@snf.stanford.edu>

system pump down fine and rf match is ok.



From ratiug at snf.stanford.edu  Fri Apr 29 14:10:43 2005
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Fri, 29 Apr 2005 14:10:43 -0700
Subject: Shutdown matrix SNF 2005-04-29 14:10:42: wafer dropped
Message-ID: <mailman.513.1357938498.25810.matrix-pcs@snf.stanford.edu>

4" dummy wafer dropped



From eenriquez at snf.stanford.edu  Fri Apr 29 15:34:43 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 29 Apr 2005 15:34:43 -0700
Subject: Shutdown matrix SNF 2005-04-29 14:10:42: wafer dropped
Message-ID: <mailman.514.1357938498.25810.matrix-pcs@snf.stanford.edu>

The wafer was on the robot.  Removed wafer and cycled several wafers with no problem.