From calarrudo at snf.stanford.edu  Wed Aug 17 18:18:53 2005
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Wed, 17 Aug 2005 18:18:53 -0700
Subject: Problem matrix SNF 2005-08-17 18:18:53: wafer broke in  chamber
Message-ID: <mailman.533.1357938498.25810.matrix-pcs@snf.stanford.edu>

wafer broke in  the chamber during processing.



From cbaxter at snf.stanford.edu  Wed Aug 17 19:14:53 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 17 Aug 2005 19:14:53 -0700
Subject: Problem matrix SNF 2005-08-17 18:18:53: wafer broke in  chamber
Message-ID: <mailman.534.1357938498.25810.matrix-pcs@snf.stanford.edu>

Cleaned up broken wafer chips inside the chamber and
cycled dummy wafers no problem seen on wafer handoff.



From ratiug at snf.stanford.edu  Mon Aug 22 12:08:30 2005
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Mon, 22 Aug 2005 12:08:30 -0700
Subject: Problem matrix SNF 2005-08-22 12:08:30: pumpdown failure
Message-ID: <mailman.535.1357938498.25810.matrix-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Aug 22 16:55:06 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 22 Aug 2005 16:55:06 -0700
Subject: Problem matrix SNF 2005-08-22 12:08:30: pumpdown failure
Message-ID: <mailman.536.1357938498.25810.matrix-pcs@snf.stanford.edu>

pump was low on oil, added  fomblin oil.



From ratiug at snf.stanford.edu  Tue Aug 23 11:56:27 2005
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Tue, 23 Aug 2005 11:56:27 -0700
Subject: Shutdown matrix SNF 2005-08-23 11:56:26: pumpdown failure
Message-ID: <mailman.537.1357938498.25810.matrix-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Tue Aug 23 16:20:40 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 23 Aug 2005 16:20:40 -0700
Subject: Shutdown matrix SNF 2005-08-23 11:56:26: pumpdown failure
Message-ID: <mailman.538.1357938498.25810.matrix-pcs@snf.stanford.edu>

Pump pressure switch was stuck.  Un-stuck the switch and re-started the pump.



From ratiug at snf.stanford.edu  Tue Aug 30 11:22:58 2005
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Tue, 30 Aug 2005 11:22:58 -0700
Subject: Shutdown matrix SNF 2005-08-30 11:22:57: match error
Message-ID: <mailman.539.1357938499.25810.matrix-pcs@snf.stanford.edu>

try several dummy wafer. Process terminated at step 2.



From eenriquez at snf.stanford.edu  Tue Aug 30 11:42:06 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 30 Aug 2005 11:42:06 -0700
Subject: Shutdown matrix SNF 2005-08-30 11:22:57: match error
Message-ID: <mailman.540.1357938499.25810.matrix-pcs@snf.stanford.edu>

Reset the RF generator circuit breaker