Shutdown matrix SNF 2005-02-15 13:47:45: Broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 15 14:15:40 PST 2005


Wafer broke outside the chamber.  It looks like it was caused by stress.  Cycle 3 wafers + user ran the rest of her wafers with no problems.




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