From eenriquez at snf.stanford.edu  Mon Jan  3 16:01:27 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Jan 2005 16:01:27 -0800
Subject: Comment matrix SNF 2005-01-03 16:01:27: Work done during shutdown
Message-ID: <mailman.497.1357938498.25810.matrix-pcs@snf.stanford.edu>

Serviced mechanical pump



From latta at snf.stanford.edu  Wed Jan  5 14:56:39 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 5 Jan 2005 14:56:39 -0800
Subject: Shutdown matrix SNF 2005-01-05 14:56:38: door did not open
Message-ID: <mailman.498.1357938498.25810.matrix-pcs@snf.stanford.edu>

My wafer is still in the tool.



From eenriquez at snf.stanford.edu  Wed Jan  5 15:59:42 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 5 Jan 2005 15:59:42 -0800
Subject: Shutdown matrix SNF 2005-01-05 14:56:38: door did not open
Message-ID: <mailman.499.1357938498.25810.matrix-pcs@snf.stanford.edu>

Reset the system.  Ran two dummy wafers with no problems.



From jnee at snf.stanford.edu  Tue Jan 11 16:58:42 2005
From: jnee at snf.stanford.edu (jnee at snf.stanford.edu)
Date: Tue, 11 Jan 2005 16:58:42 -0800
Subject: Shutdown matrix SNF 2005-01-11 16:58:42: Matching Error
Message-ID: <mailman.500.1357938498.25810.matrix-pcs@snf.stanford.edu>

Tried running standard recipe (2 minutes, as loaded from recipe card).  On step 2 (etch step) it gave "Matching Error" and does not etch and sends wafer back out to cassette.  
Tried 3X and same result each time.  



From cbaxter at snf.stanford.edu  Tue Jan 11 17:50:53 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 11 Jan 2005 17:50:53 -0800
Subject: Shutdown matrix SNF 2005-01-11 16:58:42: Matching Error
Message-ID: <mailman.501.1357938498.25810.matrix-pcs@snf.stanford.edu>

found generator and vacuum pump off. recovered wafer 
and power on both pump and generator.



From altug at snf.stanford.edu  Sun Jan 23 19:28:16 2005
From: altug at snf.stanford.edu (altug at snf.stanford.edu)
Date: Sun, 23 Jan 2005 19:28:16 -0800
Subject: Problem matrix SNF 2005-01-23 19:28:15: matching error
Message-ID: <mailman.502.1357938498.25810.matrix-pcs@snf.stanford.edu>

it termintes process due to a matching problem.



From eenriquez at snf.stanford.edu  Mon Jan 24 08:46:52 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 24 Jan 2005 08:46:52 -0800
Subject: Problem matrix SNF 2005-01-23 19:28:15: matching error
Message-ID: <mailman.503.1357938498.25810.matrix-pcs@snf.stanford.edu>

Reset the rf generator braker