Shutdown matrix SNF 2005-01-11 16:58:42: Matching Error

jnee at snf.stanford.edu jnee at snf.stanford.edu
Tue Jan 11 16:58:42 PST 2005


Tried running standard recipe (2 minutes, as loaded from recipe card).  On step 2 (etch step) it gave "Matching Error" and does not etch and sends wafer back out to cassette.  
Tried 3X and same result each time.  




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