From gibby at snf.stanford.edu  Thu Sep 29 08:33:42 2005
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Thu, 29 Sep 2005 08:33:42 -0700
Subject: Problem matrix SNF 2005-09-29 08:33:41: System would not sense wafers
Message-ID: <mailman.541.1357938499.25810.matrix-pcs@snf.stanford.edu>

The arm would come out and pick up a wafer, but the wafer would not be detected.



From eenriquez at snf.stanford.edu  Thu Sep 29 13:46:32 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 29 Sep 2005 13:46:32 -0700
Subject: Problem matrix SNF 2005-09-29 08:33:41: System would not sense wafers
Message-ID: <mailman.542.1357938499.25810.matrix-pcs@snf.stanford.edu>

Cleaned the robot arm with acetone and IPA.  Cycled 6 wafers with no problems.



From gibby at snf.stanford.edu  Thu Sep 29 14:37:15 2005
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Thu, 29 Sep 2005 14:37:15 -0700
Subject: Problem matrix SNF 2005-09-29 14:37:13: RF Power Supply light not on
Message-ID: <mailman.543.1357938499.25810.matrix-pcs@snf.stanford.edu>

Green lights on RF power supply would not turn on, even after cycling power switch



From eenriquez at snf.stanford.edu  Thu Sep 29 15:48:08 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 29 Sep 2005 15:48:08 -0700
Subject: Problem matrix SNF 2005-09-29 14:37:13: RF Power Supply light not on
Message-ID: <mailman.544.1357938499.25810.matrix-pcs@snf.stanford.edu>

Reset the breaker