From gibby at snf.stanford.edu  Tue Feb 21 16:17:19 2006
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Tue, 21 Feb 2006 16:17:19 -0800
Subject: Shutdown matrix SNF 2006-02-21 16:17:18: Pumpdown Error
Message-ID: <mailman.546.1357938499.25810.matrix-pcs@snf.stanford.edu>

System would not pump down.  I tried resetting the system and reloading the program, but I received a pumpdown error every time.



From eenriquez at snf.stanford.edu  Tue Feb 21 21:42:03 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 21 Feb 2006 21:42:03 -0800
Subject: Shutdown matrix SNF 2006-02-21 16:17:18: Pumpdown Error
Message-ID: <mailman.547.1357938499.25810.matrix-pcs@snf.stanford.edu>

Reset the vacuum pump.  Ran 3 dummy wafers.