Shutdown matrix SNF 2006-02-21 16:17:18: Pumpdown Error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Feb 21 21:42:03 PST 2006
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Shutdown matrix SNF 2006-02-21 16:17:18: Pumpdown Error
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Reset the vacuum pump. Ran 3 dummy wafers.
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Shutdown matrix SNF 2006-02-21 16:17:18: Pumpdown Error
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