Problem matrix SNF 2006-06-19 15:59:48: does not pump down
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Jun 27 09:40:44 PDT 2006
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Problem matrix SNF 2006-06-19 15:59:48: does not pump down
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Comment matrix SNF 2006-06-19 16:47:11: Pump OK, restarted by JimH, EricP
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Replaced pump. Ran 5 wafers with no problems.
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Problem matrix SNF 2006-06-19 15:59:48: does not pump down
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Comment matrix SNF 2006-06-19 16:47:11: Pump OK, restarted by JimH, EricP
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