Problem matrix SNF 2007-02-06 00:36:03: transportation error

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Tue Feb 6 00:36:04 PST 2007


arm stuck under last of 9 wafers using auto function.  Eventually machine gave restart option - pressed restart, got wafers out and now machine is paused at "wafer transport initializing".




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