Problem matrix SNF 2007-02-06 00:36:03: transportation error

dgunning at dgunning at
Tue Feb 6 00:36:04 PST 2007

arm stuck under last of 9 wafers using auto function.  Eventually machine gave restart option - pressed restart, got wafers out and now machine is paused at "wafer transport initializing".

More information about the matrix-pcs mailing list