Shutdown matrix SNF 2007-11-23 17:42:06: Matrix Down

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Fri Nov 23 17:42:07 PST 2007


during the operation, the wafer transport arm stopped in the middle of the cassette, and the error message popped up, "transport error: indexer receives." After several times of blinking of the error message, the reinitialize menu appeared on the screen. Matrix since keeps initializing on the wafer transport.




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