Problem matrix SNF 2007-11-23 17:42:26: matrix down

dongrip at dongrip at
Fri Nov 23 17:42:27 PST 2007

during the operation, the wafer transport arm stopped in the middle of the cassette, and the error message popped up, "transport error: indexer receives." After several times of blinking of the error message, the reinitialize menu appeared on the screen. Matrix since keeps initializing on the wafer transport.

More information about the matrix-pcs mailing list