Shutdown matrix SNF 2007-11-23 17:42:06: Matrix Down
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Nov 26 12:18:35 PST 2007
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Shutdown matrix SNF 2007-11-23 17:42:06: Matrix Down
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Reset system. Ran 8 wafers with no problems.
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Problem matrix SNF 2007-11-23 17:42:26: matrix down
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