From zhangy at snf.stanford.edu  Fri Jul 25 17:28:44 2008
From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu)
Date: Fri, 25 Jul 2008 17:28:44 -0700
Subject: Shutdown matrix SNF 2008-07-25 17:28:43: black screen
Message-ID: <mailman.641.1357938500.25810.matrix-pcs@snf.stanford.edu>

When wafer was transferred to the chamber, the screen became black all of a sudden. I tried to reset the tool, but nothing works. Not sure what happened, and my wafer is still stuck inside.



From cbaxter at snf.stanford.edu  Sat Jul 26 09:51:38 2008
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 26 Jul 2008 09:51:38 -0700
Subject: Shutdown matrix SNF 2008-07-25 17:28:43: black screen
Message-ID: <mailman.642.1357938500.25810.matrix-pcs@snf.stanford.edu>

The top cover interlock was not latch, re-seated top cover.