Shutdown matrix SNF 2008-03-23 16:07:20: one wafer was broken in the chumber
mitsuru at snf.stanford.edu
mitsuru at snf.stanford.edu
Sun Mar 23 16:07:20 PDT 2008
One wafer was broken in the chumber.
Almost half of a wafer remains inside it.
Sorry for your inconvenience.
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