Shutdown matrix SNF 2008-05-01 17:35:57: MATRIX

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 2 12:26:48 PDT 2008


Recovered user's wafer and placed on top of the system.  Cleaned the chamber and door assembly.   Ran 20 wafers with no problems.




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