Shutdown matrix SNF 2009-04-03 18:23:41: Door O-ring

cbaxter at cbaxter at
Wed Apr 15 17:45:37 PDT 2009

Installed new quartz chamber and he leak check. Chamber
leak rate is 9mt per mins. The o-ring for the door and top lid 
is new. Cycled dummy wafers w/out problem.

More information about the matrix-pcs mailing list