From raymondawu at snf.stanford.edu Thu Feb 12 21:29:40 2009 From: raymondawu at snf.stanford.edu (raymondawu at snf.stanford.edu) Date: Thu, 12 Feb 2009 21:29:40 -0800 Subject: Problem matrix SNF 2009-02-12 21:29:39: Booting, can't access main menu Message-ID: From eenriquez at snf.stanford.edu Fri Feb 13 13:55:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Feb 2009 13:55:05 -0800 Subject: Problem matrix SNF 2009-02-12 21:29:39: Booting, can't access main menu Message-ID: Rebooted the system and ran 5 wafers with no problems. From dgrbovic at snf.stanford.edu Fri Feb 27 16:49:14 2009 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Fri, 27 Feb 2009 16:49:14 -0800 Subject: Shutdown matrix SNF 2009-02-27 16:49:13: shutdown required to retrieve wafer Message-ID: Wafer stuck. If it is retrievable, please place in the wafer carier next to the tool. Thanks From cbaxter at snf.stanford.edu Fri Feb 27 18:36:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 27 Feb 2009 18:36:15 -0800 Subject: Shutdown matrix SNF 2009-02-27 16:49:13: shutdown required to retrieve wafer Message-ID: Recovered wafer from robot arm and intialized system. From rcordova at snf.stanford.edu Sat Feb 28 09:41:09 2009 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 28 Feb 2009 09:41:09 -0800 Subject: Problem matrix SNF 2009-02-28 09:41:09: Matrix program card is dead Message-ID: When loading the program, magetic strip side 1 fails: "Checksum error" try again. after many attempts cannot get it to load the program. From shott at snf.stanford.edu Sat Feb 28 19:34:47 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 28 Feb 2009 19:34:47 -0800 Subject: Problem matrix SNF 2009-02-28 09:41:09: Matrix program card is dead Message-ID: I found in Len's/Elmer's files on the matrix an old card labeled N-LoT90S dated 1/7/99. This card read and loaded it's recipe properly. What I don't know is whether this recipe is the same and the one on the trashed card. Someone more familiar with the tool than I will have to make this determination. But, for folks who are careful and know what their recipe should do, this should get you back on the air until Monday and more expert folks than I can take a look ... Thanks, John From shott at snf.stanford.edu Sat Feb 28 19:37:35 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 28 Feb 2009 19:37:35 -0800 Subject: Problem matrix SNF 2009-02-28 19:37:35: New (old) recipe card .... may not match current recipe. Message-ID: The card for the Martix has died, as reported by Rosie. I was able to dig up an old recipe card labeled N-LoT90s dated 1/7/99. I don't know if this is the same recipe that we ran way back then so I'd appreciate it if someone could check this out. Also, do we have any more of these cards? We should try to get some .... which, I'm guessing, may be a trick. Thanks, John