From rcordova at snf.stanford.edu Tue Jan 27 15:50:05 2009 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 27 Jan 2009 15:50:05 -0800 Subject: Problem matrix SNF 2009-01-27 15:50:05: System shut itself down. Message-ID: John Shott checked out the pump, He is changine the oil, which looked sludgy to him. Hopefully my wafer will come out. From rcordova at snf.stanford.edu Wed Jan 28 06:34:43 2009 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 28 Jan 2009 06:34:43 -0800 Subject: Problem matrix SNF 2009-01-28 06:34:42: Pleaseunload my wafer! Message-ID: I left at 4:30pm after J Shott could not get the system to come up, I left a single wafer holder in front of the machine for my one sample that is inside. From rcordova at snf.stanford.edu Wed Jan 28 06:35:43 2009 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 28 Jan 2009 06:35:43 -0800 Subject: Shutdown matrix SNF 2009-01-28 06:35:42: Tool went down yesterday! Message-ID: J Shott changed oil, but system will still not pump down. From eenriquez at snf.stanford.edu Wed Jan 28 09:01:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 09:01:18 -0800 Subject: Shutdown matrix SNF 2009-01-28 06:35:42: Tool went down yesterday! Message-ID: Removed the user's wafer from the robot arm and placed it in a container on top of the tool. The wafer on the robot arm prevented the system from resetting itself. Ran 8 wafers using the standard recipe with no problems. Note: During Standby, the chamber automatically cycle purges. The pressure normally cycles from 300 - 6000 mT. From eenriquez at snf.stanford.edu Wed Jan 28 09:01:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 09:01:44 -0800 Subject: Problem matrix SNF 2009-01-28 06:34:42: Pleaseunload my wafer! Message-ID: Removed the user's wafer from the robot arm and placed it in a container on top of the tool. The wafer on the robot arm prevented the system from resetting itself. Ran 8 wafers using the standard recipe with no problems. Note: During Standby, the chamber automatically cycle purges. The pressure normally cycles from 300 - 6000 mT. From eenriquez at snf.stanford.edu Wed Jan 28 09:02:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 09:02:13 -0800 Subject: Problem matrix SNF 2009-01-27 15:50:05: System shut itself down. Message-ID: Removed the user's wafer from the robot arm and placed it in a container on top of the tool. The wafer on the robot arm prevented the system from resetting itself. Ran 8 wafers using the standard recipe with no problems. Note: During Standby, the chamber automatically cycle purges. The pressure normally cycles from 300 - 6000 mT.