Problem matrix SNF 2009-02-28 19:37:35: New (old) recipe card .... may not match current recipe.
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Mar 2 13:16:52 PST 2009
Copied the standard program from the logbook and saved onto the white data card. Changed the recipe name to STDO2stp. Ran 3 wafers with no problems.
More information about the matrix-pcs
mailing list