Problem matrix SNF 2009-03-18 13:46:13: Several "dropped wafer" errors

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Wed Mar 18 13:46:14 PDT 2009


Wafer mis-loads on return to cassette (cross slotted) so it thinks it has dropped a wafer.  I showed Maurice the error, you just have to reboot and start the program over.   But you need to keep track of which wafer is mis slotted as well.




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