From rparsa at snf.stanford.edu Tue Nov 17 15:24:00 2009 From: rparsa at snf.stanford.edu (rparsa at snf.stanford.edu) Date: Tue, 17 Nov 2009 15:24:00 -0800 Subject: Shutdown matrix SNF 2009-11-17 15:23:59: Restart required Message-ID: System monitor says: "Dropped wafer. Power down and retrieve the wafer." The wafer has already been removed but system needs to be restarted. From eenriquez at snf.stanford.edu Wed Nov 18 16:42:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:42:07 -0800 Subject: Shutdown matrix SNF 2009-11-17 15:23:59: Restart required Message-ID: Restarted the system. From eenriquez at snf.stanford.edu Wed Nov 18 16:43:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:43:34 -0800 Subject: Comment matrix SNF 2009-11-18 16:43:34: Completed Monthly PM Message-ID: Wet cleaned the chamber. Cycled 20 wafer using the default recipe with no problems. From calarrudo at snf.stanford.edu Sat Nov 28 20:05:13 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 28 Nov 2009 20:05:13 -0800 Subject: Problem matrix SNF 2009-11-28 20:05:13: wafer stuck Message-ID: My wafer is stuck in the Matrix. From pnataraj at snf.stanford.edu Sun Nov 29 16:29:28 2009 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 29 Nov 2009 16:29:28 -0800 Subject: Comment matrix SNF 2009-11-29 16:29:27: removed the wafer , matrix is good now Message-ID: From cbaxter at snf.stanford.edu Sun Nov 29 21:47:32 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Nov 2009 21:47:32 -0800 Subject: Problem matrix SNF 2009-11-28 20:05:13: wafer stuck Message-ID: From cbaxter at snf.stanford.edu Sun Nov 29 21:47:46 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Nov 2009 21:47:46 -0800 Subject: Comment matrix SNF 2009-11-29 16:29:27: removed the wafer , matrix is good now Message-ID: