From calarrudo at snf.stanford.edu Mon Aug 23 18:35:44 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 23 Aug 2010 18:35:44 -0700 Subject: Problem matrix SNF 2010-08-23 18:35:44: No Power Message-ID: I enabled the Matrix to find there is no power to the tool. I turned of the main power as well as the RF, and still no power or display. This is the third tool I have written problems for tonight. From calarrudo at snf.stanford.edu Mon Aug 23 18:46:52 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 23 Aug 2010 18:46:52 -0700 Subject: Shutdown matrix SNF 2010-08-23 18:46:51: Matrix Message-ID: I decided to shut the tool down for the obvious reason there is no power so no display. I have a lot that needs to be back to Unity tomorrow for electrical test. I'm gold contaminated I need this tool. Maybe a fuse went bad... From eenriquez at snf.stanford.edu Tue Aug 24 10:34:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Aug 2010 10:34:21 -0700 Subject: Shutdown matrix SNF 2010-08-23 18:46:51: Matrix Message-ID: Mike restarted the system. Ran 8 wafers with no problems. From eenriquez at snf.stanford.edu Tue Aug 24 13:44:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Aug 2010 13:44:19 -0700 Subject: Problem matrix SNF 2010-08-23 18:35:44: No Power Message-ID: Mike restarted the system. Ran 8 wafers with no problems.