From calarrudo at snf.stanford.edu  Wed Dec  8 21:05:31 2010
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Wed, 8 Dec 2010 21:05:31 -0800
Subject: Shutdown matrix SNF 2010-12-08 21:05:31: 
Message-ID: <mailman.750.1357938501.25810.matrix-pcs@snf.stanford.edu>

piece of my wafer broke in the matrix.  Message on screen; warning chamber door not closed.



From eenriquez at snf.stanford.edu  Thu Dec  9 09:26:21 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 9 Dec 2010 09:26:21 -0800
Subject: Shutdown matrix SNF 2010-12-08 21:05:31: 
Message-ID: <mailman.751.1357938501.25810.matrix-pcs@snf.stanford.edu>

Recovered wafer from the chamber.  Cycled 15 wafers with no problems.