Shutdown matrix SNF 2010-12-08 21:05:31:
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Dec 9 09:26:21 PST 2010
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Shutdown matrix SNF 2010-12-08 21:05:31:
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Recovered wafer from the chamber. Cycled 15 wafers with no problems.
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Shutdown matrix SNF 2010-12-08 21:05:31:
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