From calarrudo at snf.stanford.edu  Sun May  9 19:17:33 2010
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Sun, 9 May 2010 19:17:33 -0700
Subject: Problem matrix SNF 2010-05-09 19:17:33: Will not load wafers
Message-ID: <mailman.723.1357938501.25810.matrix-pcs@snf.stanford.edu>

Wafer broke causing a misalignment, now wafers won't load.



From eenriquez at snf.stanford.edu  Mon May 10 10:39:23 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 10 May 2010 10:39:23 -0700
Subject: Shutdown matrix SNF 2010-05-10 10:39:22: Pumping problem
Message-ID: <mailman.724.1357938501.25810.matrix-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Mon May 10 13:43:27 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 10 May 2010 13:43:27 -0700
Subject: Comment matrix SNF 2010-05-10 13:43:26: pump
Message-ID: <mailman.725.1357938501.25810.matrix-pcs@snf.stanford.edu>

Pump is dead and needs to be replaced



From mdickey at snf.stanford.edu  Tue May 11 10:26:41 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 11 May 2010 10:26:41 -0700
Subject: Comment matrix SNF 2010-05-11 10:26:40: pump
Message-ID: <mailman.726.1357938501.25810.matrix-pcs@snf.stanford.edu>

pump replaced



From eenriquez at snf.stanford.edu  Tue May 11 15:44:33 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 11 May 2010 15:44:33 -0700
Subject: Comment matrix SNF 2010-05-11 15:44:32: Update
Message-ID: <mailman.727.1357938501.25810.matrix-pcs@snf.stanford.edu>

New pump is making too much noise.  Chamber is not pumping down.



From eenriquez at snf.stanford.edu  Wed May 12 15:06:52 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 12 May 2010 15:06:52 -0700
Subject: Shutdown matrix SNF 2010-05-10 10:39:22: Pumping problem
Message-ID: <mailman.728.1357938501.25810.matrix-pcs@snf.stanford.edu>

Replaced vacuum pump and wet cleaned the chamber.  Ran 10 wafers wth no problems.



From eenriquez at snf.stanford.edu  Wed May 12 15:07:18 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 12 May 2010 15:07:18 -0700
Subject: Problem matrix SNF 2010-05-09 19:17:33: Will not load wafers
Message-ID: <mailman.729.1357938501.25810.matrix-pcs@snf.stanford.edu>

Replaced vacuum pump and wet cleaned the chamber.  Ran 10 wafers wth no problems.



From eenriquez at snf.stanford.edu  Wed May 12 15:07:27 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 12 May 2010 15:07:27 -0700
Subject: Comment matrix SNF 2010-05-10 13:43:26: pump
Message-ID: <mailman.730.1357938501.25810.matrix-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed May 12 15:07:35 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 12 May 2010 15:07:35 -0700
Subject: Comment matrix SNF 2010-05-11 10:26:40: pump
Message-ID: <mailman.731.1357938501.25810.matrix-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed May 12 15:07:41 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 12 May 2010 15:07:41 -0700
Subject: Comment matrix SNF 2010-05-11 15:44:32: Update
Message-ID: <mailman.732.1357938501.25810.matrix-pcs@snf.stanford.edu>

Archived