Problem matrix SNF 2010-11-02 19:43:42: Transport error: indexer receive

yoneoka at snf.stanford.edu yoneoka at snf.stanford.edu
Tue Nov 2 19:43:43 PDT 2010


The machine showed error message "transport error" when it returns the wafer. The error message did not turn off and I could not continue the process. I think we need to reset the system.




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