From eenriquez at snf.stanford.edu  Fri Oct  1 08:20:25 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 1 Oct 2010 08:20:25 -0700
Subject: Shutdown matrix SNF 2010-09-30 16:43:22: Gives pumpdown error
Message-ID: <mailman.745.1357938501.25810.matrix-pcs@snf.stanford.edu>

Chamber door o-ring came off.  Reinstalled door o-ring and cycled 15 wafers.



From eenriquez at snf.stanford.edu  Mon Oct 25 11:05:55 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Oct 2010 11:05:55 -0700
Subject: Comment matrix SNF 2010-09-29 11:09:19: Completed monthly pm
Message-ID: <mailman.746.1357938501.25810.matrix-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Mon Oct 25 11:06:08 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Oct 2010 11:06:08 -0700
Subject: Comment matrix SNF 2010-10-25 11:06:08: Comleted monthly PM
Message-ID: <mailman.747.1357938501.25810.matrix-pcs@snf.stanford.edu>