From zzp at snf.stanford.edu  Fri Sep 10 23:35:01 2010
From: zzp at snf.stanford.edu (zzp at snf.stanford.edu)
Date: Fri, 10 Sep 2010 23:35:01 -0700
Subject: Problem matrix SNF 2010-09-10 23:35:00: transport indexer error
Message-ID: <mailman.739.1357938501.25810.matrix-pcs@snf.stanford.edu>

currently cannot load wafers



From eenriquez at snf.stanford.edu  Mon Sep 13 10:57:36 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 13 Sep 2010 10:57:36 -0700
Subject: Problem matrix SNF 2010-09-10 23:35:00: transport indexer error
Message-ID: <mailman.740.1357938501.25810.matrix-pcs@snf.stanford.edu>

No problem found.  Ran 5 wafers.



From ryhuang at snf.stanford.edu  Fri Sep 17 17:54:18 2010
From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu)
Date: Fri, 17 Sep 2010 17:54:18 -0700
Subject: Problem matrix SNF 2010-09-17 17:54:17: metal peeled...
Message-ID: <mailman.741.1357938501.25810.matrix-pcs@snf.stanford.edu>

Some Au features on one of my wafers peeled during processing.  Ran a dummy wafer afterwards which came out without any visible particles.  However, chamber may need to be opened and inspected.
Robert



From cbaxter at snf.stanford.edu  Mon Sep 20 05:02:21 2010
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 20 Sep 2010 05:02:21 -0700
Subject: Problem matrix SNF 2010-09-17 17:54:17: metal peeled...
Message-ID: <mailman.742.1357938501.25810.matrix-pcs@snf.stanford.edu>

Opened up chamber and wiped down...



From eenriquez at snf.stanford.edu  Wed Sep 29 11:09:19 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 29 Sep 2010 11:09:19 -0700
Subject: Comment matrix SNF 2010-09-29 11:09:19: Completed monthly pm
Message-ID: <mailman.743.1357938501.25810.matrix-pcs@snf.stanford.edu>

Wet cleaned the chamber and cycled 15 wafers.



From latta at snf.stanford.edu  Thu Sep 30 16:43:23 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 30 Sep 2010 16:43:23 -0700
Subject: Shutdown matrix SNF 2010-09-30 16:43:22: Gives pumpdown error
Message-ID: <mailman.744.1357938501.25810.matrix-pcs@snf.stanford.edu>

and makes a lovely sound while trying to pumpdown.....