Problem matrix SNF 2010-09-17 17:54:17: metal peeled...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Fri Sep 17 17:54:18 PDT 2010


Some Au features on one of my wafers peeled during processing.  Ran a dummy wafer afterwards which came out without any visible particles.  However, chamber may need to be opened and inspected.
Robert




More information about the matrix-pcs mailing list