Comment matrix SNF 2010-09-29 11:09:19: Completed monthly pm
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Sep 29 11:09:19 PDT 2010
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Problem matrix SNF 2010-09-17 17:54:17: metal peeled...
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Wet cleaned the chamber and cycled 15 wafers.
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Problem matrix SNF 2010-09-17 17:54:17: metal peeled...
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Shutdown matrix SNF 2010-09-30 16:43:22: Gives pumpdown error
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