Shutdown matrix SNF 2011-11-30 23:34:46: indexer error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Dec 1 11:43:21 PST 2011
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Comment matrix SNF 2011-12-04 23:55:14: set the chuck temperature back to 190oC
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No problem found. Cycled wafers without any problems.
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Comment matrix SNF 2011-12-04 23:55:14: set the chuck temperature back to 190oC
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