From eenriquez at snf.stanford.edu Wed Jan 5 07:40:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Jan 2011 07:40:42 -0800 Subject: Comment matrix SNF 2010-10-25 11:06:08: Comleted monthly PM Message-ID: Archived From aintlekofer at snf.stanford.edu Fri Jan 14 16:21:44 2011 From: aintlekofer at snf.stanford.edu (aintlekofer at snf.stanford.edu) Date: Fri, 14 Jan 2011 16:21:44 -0800 Subject: Comment matrix SNF 2011-01-14 16:21:43: chuck temp. 100C Message-ID: lower chuck temperature (100C) etch rate for 3612 photoresist ~70nm/min reset chuck temp. to 185C after test run From eenriquez at snf.stanford.edu Tue Jan 18 11:28:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Jan 2011 11:28:46 -0800 Subject: Comment matrix SNF 2011-01-14 16:21:43: chuck temp. 100C Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jan 18 11:28:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Jan 2011 11:28:51 -0800 Subject: Comment matrix SNF 2011-01-18 11:28:51: Completed Monthly PM Message-ID: