From sabrinali at snf.stanford.edu  Sat Jul 23 16:22:18 2011
From: sabrinali at snf.stanford.edu (sabrinali at snf.stanford.edu)
Date: Sat, 23 Jul 2011 16:22:18 -0700
Subject: Shutdown matrix SNF 2011-07-23 16:22:18: a wafer was broken inside Matrix
Message-ID: <mailman.778.1357938501.25810.matrix-pcs@snf.stanford.edu>

A piece of wafer came out, but another piece of wafer is still inside Matrix.



From eenriquez at snf.stanford.edu  Mon Jul 25 10:10:59 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Jul 2011 10:10:59 -0700
Subject: Shutdown matrix SNF 2011-07-23 16:22:18: a wafer was broken inside Matrix
Message-ID: <mailman.779.1357938501.25810.matrix-pcs@snf.stanford.edu>

Recovered the user's wafer and cleaned the chamber.  Ran 6 wafers with no problems.



From sghanbari at snf.stanford.edu  Mon Jul 25 10:33:07 2011
From: sghanbari at snf.stanford.edu (sghanbari at snf.stanford.edu)
Date: Mon, 25 Jul 2011 10:33:07 -0700
Subject: Problem matrix SNF 2011-07-25 10:33:06: broken wafer inside matrix
Message-ID: <mailman.780.1357938501.25810.matrix-pcs@snf.stanford.edu>




From sabrinali at snf.stanford.edu  Mon Jul 25 13:44:52 2011
From: sabrinali at snf.stanford.edu (sabrinali at snf.stanford.edu)
Date: Mon, 25 Jul 2011 13:44:52 -0700
Subject: Shutdown matrix SNF 2011-07-25 13:44:51: a wafer was broken inside Matrix
Message-ID: <mailman.781.1357938501.25810.matrix-pcs@snf.stanford.edu>

A part of wafer came out, bot another part of wafer is sill inside matrix.



From eenriquez at snf.stanford.edu  Mon Jul 25 14:59:43 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Jul 2011 14:59:43 -0700
Subject: Shutdown matrix SNF 2011-07-25 13:44:51: a wafer was broken inside Matrix
Message-ID: <mailman.782.1357938501.25810.matrix-pcs@snf.stanford.edu>

Removed broken wafer pieces.  Cycled wafers with no problems.  
All wafers that have broken so far have been from cassette slots > 4.  Please only run wafers from cassette slot 1-4.  I will cycle a full cassette tomorrow to troubleshoot the problem.



From eenriquez at snf.stanford.edu  Mon Jul 25 14:59:58 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Jul 2011 14:59:58 -0700
Subject: Problem matrix SNF 2011-07-25 10:33:06: broken wafer inside matrix
Message-ID: <mailman.783.1357938502.25810.matrix-pcs@snf.stanford.edu>

Removed broken wafer pieces.  Cycled wafers with no problems.  
All wafers that have broken so far have been from cassette slots > 4.  Please only run wafers from cassette slot 1-4.  I will cycle a full cassette tomorrow to troubleshoot the problem.



From eenriquez at snf.stanford.edu  Mon Jul 25 15:00:45 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Jul 2011 15:00:45 -0700
Subject: Problem matrix SNF 2011-07-25 15:00:44: Handling problem
Message-ID: <mailman.784.1357938502.25810.matrix-pcs@snf.stanford.edu>

  
All wafers that have broken so far have been from cassette slots > 4.  Please only run wafers from cassette slot 1-4.  I will cycle a full cassette tomorrow to troubleshoot the problem.



From eenriquez at snf.stanford.edu  Tue Jul 26 15:05:41 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 26 Jul 2011 15:05:41 -0700
Subject: Problem matrix SNF 2011-07-25 15:00:44: Handling problem
Message-ID: <mailman.785.1357938502.25810.matrix-pcs@snf.stanford.edu>

Cycled 50 wafers (2 x 25) with no problems.