Shutdown matrix SNF 2011-07-25 13:44:51: a wafer was broken inside Matrix

eenriquez at eenriquez at
Mon Jul 25 14:59:43 PDT 2011

Removed broken wafer pieces.  Cycled wafers with no problems.  
All wafers that have broken so far have been from cassette slots > 4.  Please only run wafers from cassette slot 1-4.  I will cycle a full cassette tomorrow to troubleshoot the problem.

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