From calarrudo at snf.stanford.edu Wed May 4 20:12:35 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 4 May 2011 20:12:35 -0700 Subject: Problem matrix SNF 2011-05-04 20:12:34: sensor off Message-ID: wafer sensor is off on wafer loader, does not recognize wafer. From calarrudo at snf.stanford.edu Wed May 4 20:12:42 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 4 May 2011 20:12:42 -0700 Subject: Shutdown matrix SNF 2011-05-04 20:12:41: Message-ID: From eenriquez at snf.stanford.edu Thu May 5 09:43:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 May 2011 09:43:23 -0700 Subject: Problem matrix SNF 2011-05-04 20:12:34: sensor off Message-ID: No problem found. Ran 12 wafers with no problems. From eenriquez at snf.stanford.edu Thu May 5 09:43:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 May 2011 09:43:29 -0700 Subject: Shutdown matrix SNF 2011-05-04 20:12:41: Message-ID: No problem found. Ran 12 wafers with no problems. From mislam at snf.stanford.edu Tue May 17 00:40:22 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 17 May 2011 00:40:22 -0700 Subject: Problem matrix SNF 2011-05-17 00:40:22: Transport error while unloading wafer Message-ID: From eenriquez at snf.stanford.edu Tue May 17 10:24:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 May 2011 10:24:12 -0700 Subject: Problem matrix SNF 2011-05-17 00:40:22: Transport error while unloading wafer Message-ID: Reset the system. Ran 10 wafers with no problems.