From yiching at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Apr 12, 2000 Subject: Problem matrix: matrix Message-ID: screen shows the message "dropped wafer. To resume operation, power down and retrieve wafer". But there shouldn't be any wafers inside. all of my wafers were run normally and returned to the cassette. From booth at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear matrix: Message-ID: looks OK this morning. From sjlee at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Apr 15, 2000 Subject: Shutdown matrix: Error: "No wafer sensed in chamber" at end of dummy-wafer run. Message-ID: Error: "No wafer sensed in chamber" at end of dummy-wafer run. From booth at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 17, 2000 Subject: Shutdown Clear matrix: removed dropped dummy wafer. Message-ID: From true at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: May 1, 2000 Subject: Shutdown matrix: Message-ID: Wafer Stuck in chamber. Machine and the whole room were vibrating quite a bit. --Randy True 8:30pm 5/1 From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 2, 2000 Subject: Shutdown Clear matrix: remove wafer from chamber Message-ID: From zhang at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: May 9, 2000 Subject: Shutdown matrix: Message-ID: wafer stuck in chamber From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 9, 2000 Subject: Shutdown Clear matrix: remove wafer from chamber Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 5, 2000 Subject: Shutdown matrix: Shutdown - moving machine Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 7, 2000 Subject: Shutdown Clear matrix: system moved is completed and ready to be use.. Message-ID: From true at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Jun 26, 2000 Subject: Shutdown matrix: wafer stuck Message-ID: says power downa nd retrieve From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 26, 2000 Subject: Shutdown Clear matrix: removed wafer from chamber Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 6, 2000 Subject: Problem matrix: System lamp is burned out Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 6, 2000 Subject: Problem Clear matrix: changed burned lamps.. Message-ID: From tbilir at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: tbilir at snf.stanford.edu (tbilir at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown matrix: wafer in chamber Message-ID: From tbilir at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: tbilir at snf.stanford.edu (tbilir at snf.stanford.edu) Date: Jul 31, 2000 Subject: Problem matrix: wafer in chamber Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Jul 31, 2000 Subject: Problem Clear matrix: Matric dirty wafer out Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown Clear matrix: dirty wafer out Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown Clear matrix: Dirty wafer out. jim Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Jul 31, 2000 Subject: Problem Clear matrix: Dirty wafer out. jim Message-ID: From tbilir at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: tbilir at snf.stanford.edu (tbilir at snf.stanford.edu) Date: Aug 1, 2000 Subject: Shutdown matrix: wafer not sensed in chamber Message-ID: From bchui at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Aug 4, 2000 Subject: Problem matrix: Message-ID: RF problem. From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 7, 2000 Subject: Shutdown Clear matrix: check alignment and its ok Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear matrix: Message-ID: From pindermu at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Aug 9, 2000 Subject: Problem matrix: green lights are off; not possible to turn them on Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 10, 2000 Subject: Problem Clear matrix: Message-ID: From bchui at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Aug 14, 2000 Subject: Shutdown matrix: wafer lost inside chamber Message-ID: machine gave "cannot sense wafer" error when trying to retrieve wafer after etch. Wafer appears to have fallen off one or more pins. From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 14, 2000 Subject: Shutdown Clear matrix: removed wafer and align transport arm Message-ID: From pindermu at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Aug 15, 2000 Subject: Shutdown matrix: wafer lost inside Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 15, 2000 Subject: Shutdown Clear matrix: removed wafer.... Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 1, 2000 Subject: Shutdown matrix: Dead. Will not re-set. Message-ID: From shott at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sep 1, 2000 Subject: Shutdown Clear matrix: System reset and wafer cleared .... Message-ID: Randy True cleared the wafer and reset things so I'm clearing this shutdown. John From caudillo at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 9, 2000 Subject: Shutdown matrix: wafer is stuck in chamber Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 9, 2000 Subject: Shutdown Clear matrix: removed wafer from chamber. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 9, 2000 Subject: Problem matrix: Prob with loading fork use at your own risk Message-ID: From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-08-17 16:24:56: no process cooling water Message-ID: <22328657.166.1345245896942.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-08-17 16:24:56: no process cooling water Message-ID: <27200650.185.1345250437953.JavaMail.coral@shine> System back to normal.. From fpurkl at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-08-20 10:06:42: chamber door squeaks Message-ID: <4897386.27.1345482402585.JavaMail.coral@shine> Chamber door makes squeaking sound when it opens. It takes up to 30s to open. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-08-20 10:06:42: chamber door squeaks Message-ID: <4268406.41.1345488791623.JavaMail.coral@shine> No problem found. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-08-22 08:56:58: Handling probem Message-ID: <3568903.41.1345651018632.JavaMail.coral@shine> Robot arm finding an unexpected wafer during the load process. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-08-22 08:56:58: Handling probem Message-ID: <11072724.46.1345661465696.JavaMail.coral@shine> Adjusted the pin pnuematic pressure to 75 psi From derickson at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-11 10:25:39: Loud venting Message-ID: <19684454.75.1347384339572.JavaMail.coral@shine> Very loud venting sound when wafer is unloaded and continues until the chamber is pumped down. From mdickey at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-11 10:40:19: valve Message-ID: <12367817.76.1347385220068.JavaMail.coral@shine> System has a N2 leak on a solenoid valve From mdickey at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-09-11 13:30:27: valve Message-ID: <7097325.82.1347395427521.JavaMail.coral@shine> Need to fix or replace leaky solenoid valve From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-09-11 13:30:27: valve Message-ID: <3542827.85.1347401940136.JavaMail.coral@shine> Replaced leaky valve From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-11 10:40:19: valve Message-ID: <3980375.86.1347401945165.JavaMail.coral@shine> Replaced leaky valve From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-11 10:25:39: Loud venting Message-ID: <18104861.87.1347401950173.JavaMail.coral@shine> Replaced leaky valve From gyama at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-09-20 16:08:10: far right white button Message-ID: <28412888.88.1348182490970.JavaMail.coral@shine> need to press really hard now, should be replaced again From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-20 16:57:37: Standby/Exit push botton Message-ID: <16665355.90.1348185457471.JavaMail.coral@shine> The momentary push botton switch is has poor contact, I cleaned it with ipa and its working fine again. Will work on getting a replacement push botton switch. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-09-20 16:08:10: far right white button Message-ID: <1693320.5.1348241407823.JavaMail.coral@shine> Repaired the right button From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-09-20 16:57:37: Standby/Exit push botton Message-ID: <13742035.6.1348241414831.JavaMail.coral@shine> Archived From wslee at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-01 16:41:02: wafer stuck in chamber Message-ID: <2708073.17.1349134862598.JavaMail.coral@shine> Upon completion of the recipe, matrix beeped and shows error message "no wafer sensed in chamber; to resume operation power down and retrieve wafer" Please retrieve wafer and place in 4" carrier on the tool. Thanks. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-01 16:41:02: wafer stuck in chamber Message-ID: <49194.2.1349191130111.JavaMail.coral@shine> Recovered the user's wafer. Cycled several wafers with no problems. From calarrudo at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-16 15:33:21: Message-ID: <9392152.54.1350426802971.JavaMail.coral@shine> my wafer won't unload From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-16 15:33:21: Message-ID: <10576835.57.1350432947138.JavaMail.coral@shine> Recovered wafer inside the chamber and verified load/unload from chamber. From gsosa at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-30 07:36:10: Electrical work 10/30 Message-ID: <26516811.42.1351607771918.JavaMail.coral@shine> Scheduled electrical work in breaker panel From gsosa at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-30 07:36:10: Electrical work 10/30 Message-ID: <12068486.53.1351616468198.JavaMail.coral@shine> Electrical work completed. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-31 13:06:40: Not pumping down. Message-ID: <10930545.120.1351714001653.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-10-31 13:06:40: Not pumping down. Message-ID: <4196959.125.1351720398823.JavaMail.coral@shine> Found loose KF clamps in the vacuum line. Ran 2 wafers with no problems. From popomoo at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-11-02 00:06:11: Its pressure keeps changing Message-ID: <22269496.169.1351839971424.JavaMail.coral@shine> I'm not a qualified user of this machine, so I don't know how it should be in normal mode. However, I think it looks something wrong in this machine now. The machine keeps making hissing sound. I used the STS etching machine for about two hours, and during that time, the matrix has being made that sound. I check the screen, and the pressure keeps changing now from 6000mTorr to ~25mTorr. From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-11-02 00:06:11: Its pressure keeps changing Message-ID: <24028805.174.1351866426292.JavaMail.coral@shine> This is normal. The chamber cycle purges when its on standby. Thanks From faridz at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-03 11:34:30: wafer stuck inside the chamber Message-ID: <5050494.12.1354563270961.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-03 11:34:30: wafer stuck inside the chamber Message-ID: <21470815.16.1354568361016.JavaMail.coral@shine> Wafer was recovered... From faridz at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-12-03 14:16:41: Message-ID: <26830576.19.1354573002320.JavaMail.coral@shine> process 15 wafers through all wafers had in complete strip and two wafers no strip at all. It ight be a leak in the system or plasma not striking please check. From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Problem matrix SNF 2012-12-03 14:16:41: Message-ID: <8700607.34.1354582249121.JavaMail.coral@shine> Ran 3 resist wafers and all 3 was clean after resist stripped. From zzp at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-06 13:13:33: wafer lost in the chamber Message-ID: <5662259.0.1354828414357.JavaMail.coral@shine> please help me retrieve it, thanks! From eenriquez at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-12-06 14:27:39: Update Message-ID: <18229916.0.1354832860154.JavaMail.coral@shine> Recovered the waferbut we broke the quartz gas inlet. We will replace the chamber tomorrow morning. From mdickey at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-06 13:13:33: wafer lost in the chamber Message-ID: <22910981.22.1354904615137.JavaMail.coral@shine> Replaced damaged chamber and tested. Back up for use. From usha at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-14 15:57:23: Not stripping resist Message-ID: <6841558.32.1355529444659.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-12-14 17:41:30: Update Message-ID: <9840044.41.1355535690630.JavaMail.coral@shine> Its not stricking plasma, RF forward power is good at 400watts and no reflective power, currently working on P5000 will continue to troubleshoot after P5000. From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Shutdown matrix SNF 2012-12-14 15:57:23: Not stripping resist Message-ID: <402254.48.1355545441786.JavaMail.coral@shine> Found the chuck heater was at 24C and AC circuit was turned off. Switched AC breaker on and ramped chcuk temperature back to 190C. Ran 3 coateed resist wafers and all 3 wafer stripped clean. From cbaxter at snf.stanford.edu Fri Jan 11 13:08:15 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:08:15 -0000 Subject: Comment matrix SNF 2012-12-14 17:41:30: Update Message-ID: <25869435.5.1355672605820.JavaMail.coral@shine>