Matrix - NO backside resist

Len Booth booth at snf.stanford.edu
Tue Nov 14 12:48:04 PST 2000


Matrix users -
	Wafers loaded into the Matrix stripper
must NOT have any resist on the backside.  The
cathode in this machine is electricaly heated
to optomize the strip process - resist on the
backside can be softened enough to make the
wafer become glued to the cathode.  That is
what happened this morning.  If you have been
loading wafers with resist on the backside -
STOP!  See Jim McVittie for advice on 
alternative processes.
			Len



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