photoresist removal

Sanli Ergun sanli at piezo.Stanford.EDU
Wed Mar 21 09:22:01 PST 2001


Hi,
Thanks for your response. I spent about two days going back and forth
between matrix and H2SO4/H2O2, and finally got rid of it. However, for
next time it would be great to have such a program. I'll ask you when I
need it again.
Thanks,

On Wed, 21 Mar 2001, Jim McVittie wrote:

> Sanli,
>
> The best way to remove your implanted resist is to use the Matrix either
> with forming gas (N2/H2) or with O2 plus CF4. THis a pretty standard
> method in industry. Unfortunalely, niether forming gas or Cf4 are
> presently plumbed to the Matrix. Sometime ago I requested that one of
> these gases be added. An alternative method is to contact one of the wet
> stripper vendors and get one of their magic strips. I can give you some
> names. The final method is to use the present O2 matrix plasma and
> H2S4/H2O2. With the Matrix using O2 you only want to take off the top
> layer and not over heat the resist to point that bubbles form and blow-up.
> To do this you want run with the pins up (wafer off the heated electrode)
> and keep both the power and the time down. If you want, I can generate
> a Mayrix program to do this.
> 			Jim
> --------------------------------------------------------------
> James P. McVittie	                Senior Research Scientist
> Allen Center for Integrated Systems     jmcvittie at stanford.edu
> Stanford University             	Tel: (650) 725-3640
> Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
> Stanford, CA 94305-4075
>
> On Tue, 20 Mar 2001, Sanli Ergun wrote:
>
> >
> > Hi everybody,
> > I had a high energy (90 kEV Phosphorus) ion implantation on my wafers. The
> > resist thickness was 2.4 um. I have gone through matrix and wbnonmetal
> > several times back and forth, but I can't get rid of some residues on the
> > edges. Did any of you experience such a problem before, and figure out a
> > way to solve it?
> >
> > Thanks,
> >
> > Sanli
> >
> >
> >
>
>

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html




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