From edmyers at stanford.edu  Mon Aug 23 12:04:08 2004
From: edmyers at stanford.edu (Ed Myers)
Date: Mon, 23 Aug 2004 12:04:08 -0700
Subject: Matrix Asher will soon be Gold Contaminated
Message-ID: <6.0.1.1.2.20040823114834.01b8e188@edmyers.pobox.stanford.edu>

Matrix Users,

It is critical you transfer your clean ash processes to the Gasonics by 
October 1st.

The Matrix Asher will be reclassified as a GOLD CONTAMINATED tool beginning 
October 1st.  This change is possible with the Gasonic Asher coming on line 
as the CLEAN ash tool.

The Gasonics Aura Asher is an automated upstream microwave plasma system 
with quartz halogen lamp heating used for stripping photoresist of clean 
non-metal and standard metal 4 inch silicon wafers.  The system generates a 
plasma of oxygen and nitrogen in a reaction chamber.  This reactive mixture 
flows downstream to the process chamber where it reaches a state of 
"afterglow," where it is highly reactive and no longer electrically active 
or damaging to the wafer surface.

A wide variety of ash time recipes have been programmed in to the 
system.  There is also a common gas-pressure stabilization recipe and an 
optional high temperature ash initiation recipe.  Three recipes can be 
stringed together to form the ash process sequence (one of which needs to 
be the gas-pressure stabilization recipe).  The flexibility provided by the 
three step process sequence should allow for ashing of all of our common 
resist layers.  If you find the standard recipes do not fit your needs, 
please let me know so that we can define a custom recipe to fit your needs.

Email me for training for the Gasonic Asher at emyers at snf.stanford.edu or 
edmyers at stanford.edu


Regards,

Ed Myers
Stanford Nanofabrication Facility
CIS Room 143, Mail Code 4070
Stanford, CA  94305
(650)725-4702
edmyers at stanford.edu