Gasonics Vs Matrix Reminder

Ed Myers edmyers at
Fri Sep 17 10:28:36 PDT 2004

SNF Lab Members,

The Gasonic Aura Asher has been in use for the past couple of weeks.  I've 
gotten all positive reports from those who have been using the 
Gasonics.  As a reminder the tool is designated strictly for Non-metals and 
Standard Metals Only.

The Gasonic will be replacing the Matrix Asher as the Clean Asher for the 
facility.  The goal is to have all certified Matrix users transfer their 
processes to the Gasonic by Oct. 1st.  Beginning October 1st, the Matrix 
Asher will migrate to the Gold Contaminated equipment group and become 
available for processing gold contaminated wafers.

Please have your training and processes transferred from the Matrix to the 
Gasonics by October 1st.

Training can be scheduled by emailing Ed Myers at emyers at 
or edmyers at


Ed Myers
Stanford Nanofabrication Facility
CIS Room 143, Mail Code 4070
Stanford, CA  94305
edmyers at

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