From kimsangb at stanford.edu  Sat Oct 24 17:08:30 2009
From: kimsangb at stanford.edu (SangBum Kim)
Date: Sat, 24 Oct 2009 17:08:30 -0700 (PDT)
Subject: pins: UP vs UP RF
Message-ID: <360576086.5537991256429310709.JavaMail.root@zm01.stanford.edu>

Hello,

 Does anyone know the difference between 'UP' and 'UP RF' for pin setting? I did not want to put my wafers directly on hot plate, so I wanted to raise pins up. There are two options to choose from, 1) 'UP' and 2) 'UP RF', and I don't know the difference...

Thanks,
SangBum