pins: UP vs UP RF

SangBum Kim kimsangb at
Sat Oct 24 17:08:30 PDT 2009


 Does anyone know the difference between 'UP' and 'UP RF' for pin setting? I did not want to put my wafers directly on hot plate, so I wanted to raise pins up. There are two options to choose from, 1) 'UP' and 2) 'UP RF', and I don't know the difference...


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